Rapid Thermal Processing of Semiconductors (Microdevices) |
 enlarge | Authors: Victor E. Borisenko, Peter J. Hesketh
Publisher: Springer
Category: Book
List Price: $95.00
Buy New: $75.96
You Save: $19.04 (20%)
New (15) Used (7) from $64.95
Sales Rank: 2231871
Media: Hardcover
Edition: 1
Number Of Items: 1
Pages: 380
Shipping Weight (lbs): 2.1
Dimensions (in): 9.9 x 6.4 x 1
ISBN: 0306450542
Dewey Decimal Number: 621.38152
EAN: 9780306450549
ASIN: 0306450542
Publication Date: May 31, 1997
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Product Description
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
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